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Infrared laser scribing machine
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Detailed introduction
The AS113S series laser scribing machine is a dedicated device in the 0201 chip resistor process. It is suitable for the scribing process of small-sized ceramic substrates, and achieves efficient and stable fully automatic scribing through a high-precision linear positioning platform and a high-power laser.
This equipment has a high-precision vision alignment system. Top and bottom cameras enable scribing on both the front and back sides, ensuring the alignment of the scribed lines on both sides.
1. Main Indicators
|
Working Range |
X/Y Axis Travel |
mm |
250/200 |
|
Substrate Size |
mm |
80*80 (optional) |
|
|
Scribing Parameters |
Scribing Speed |
mm/s |
400 |
|
Scribing Depth |
μm |
20-150 |
|
|
Optical System |
Spot Size |
μm |
20 |
|
Laser Wavelength |
nm |
1070 |
|
|
Laser Power |
w |
100 |
|
|
Focusing Accuracy |
μm |
<2 |
|
|
Worktable |
Positioning Accuracy |
μm |
<1.5 |
|
Rotation Accuracy |
″ |
1 |
|
|
Vision System |
Image System |
|
Dual CCD System |
|
Control System |
PCI Card |
|
8-axis High-speed Control Card |
|
Mechanical Parameters |
Length/Width/Height |
m |
1.3/1.1/1.5 |
|
Equipment Weight |
kg |
980 |
2. Product Features
|
Main Parameters |
Performance Description |
Remarks |
|
Scribing Quality |
For 0201 scribing, the I-grade and II-grade scribe groove morphology conforms to a 1:1 ratio of vaporization layer and hot melt layer depth; depth, width, etc., must meet technical requirements; the chip breakage rate after scribing <0.1%; |
See Appendix 1 |
|
Scribing Process |
1. Crater height is adjustable from 0-4μm. 2. The crater presents a groove morphology, with a groove depth >3μm. |
|
|
Production Capacity |
Taking the 0201 model as an example, the continuous production capacity for completing front and back scribing is no less than 380 pieces/day. |
|
|
Precision |
1. The overall scribing accuracy of the machine is less than ±5μm. 2. The pitch value error is less than ±0.5μm. 3. The alignment after scribing ≤5μm. |
|
|
Component Selection |
1. Uses lasers equivalent to those used in Xijin scribing machines (Febon). 2. Linear platforms use well-known brands such as THK and Oriental Motor. 3. Warranty period of 3 years or more. |
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Functional Configuration |
1. The scribing machine has a built-in graphic editing function, which is simple and convenient to operate, and can provide data input error prompts and parameter abnormality reminders. 2. Key parameters include access control to prevent misoperation. |
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Stability |
The scribing machine has good stability. After successful debugging, the quality and process can be maintained stably for a long time, with basically no downtime under normal operation, and maintenance once can work for more than a month. |
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