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Company name: changchun guanghua microelectronics equipment engineering center co., LTD
Address: Changchun city of jilin province high and new north district MingXi road 1759
Telephone: +86-431-81785047  Fax: +86-431-81785047
Email:ghgsjyb2004@163.com

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Name:

Wafer Test Prober:APT121A

Product description

  APT121A wafer test prober is a special device for wafer testing, which is suitable for testing 8-inch and 12-inch wafer. By position platform of high precision、wafer chuck of high rigidity、needle alignment unit camera and wafer alignment unit camera of high resolution, loading/unloading wafer automatically,alignment needles and testing are realized.

 

Function Index

diameter of Wafer

mm

300/200

 

comprehensive precision

μm

≤±2

 

bearing capacity of Chuck

Kg

200

High Temperature Testing

temperature controlling range

30-150

 

temperature control precision

±2

precision index

X/Y-axis

μm

±0.5

 

Z-axis

μm

±2

image system

Wafer/needle alignment camera

magnification

Low and high

 

image card

Port

2 ports /4 ports

control system

Controller

Axis number

PMAC(8 axes)x2

mechanical parameter

Prober unit

Length/width/height

mm

1775/1095/1005

 

 

Weight of machine

kg

1750

 

Loader unit

Length/width/height

mm

1830/632/1617

 

 

Weight of machine

kg

550

 

Corresponding parameter set not found, please add it in property template of background
暂未实现,敬请期待
暂未实现,敬请期待
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