Pooduct hotline：+86-431-81785047
Welcome to Changchun Guanghua Microelectronics Equipment Engineering Center Co., Ltd!
Company name: changchun guanghua microelectronics equipment engineering center co., LTD
Address: Changchun city of jilin province high and new north district MingXi road 1759
Telephone: +86-431-81785047 Fax: +86-431-81785047
Email:ghgsjyb2004@163.com
All rights reserved: Changchun Guanghua Microelectronic Equipment Engineering Center Co., Ltd 吉ICP备案14005341号 Powerd by：www.300.cn
Wafer Test Prober：APT121A
APT121A wafer test prober is a special device for wafer testing, which is suitable for testing 8-inch and 12-inch wafer. By position platform of high precision、wafer chuck of high rigidity、needle alignment unit camera and wafer alignment unit camera of high resolution, loading/unloading wafer automatically，alignment needles and testing are realized.
|
Function Index |
diameter of Wafer |
mm |
300/200 |
|
|
|
comprehensive precision |
μm |
≤±2 |
|
|
|
bearing capacity of Chuck |
Kg |
200 |
|
|
temperature controlling range |
℃ |
30-150 |
||
|
|
temperature control precision |
℃ |
±2 |
|
|
precision index |
X/Y-axis |
μm |
±0.5 |
|
|
|
Z-axis |
μm |
±2 |
|
|
image system |
Wafer/needle alignment camera |
magnification |
Low and high |
|
|
|
image card |
Port |
2 ports /4 ports |
|
|
control system |
Controller |
Axis number |
PMAC（8 axes）x2 |
|
|
mechanical parameter |
Prober unit |
Length/width/height |
mm |
1775/1095/1005 |
|
|
|
Weight of machine |
kg |
1750 |
|
|
Loader unit |
Length/width/height |
mm |
1830/632/1617 |
|
|
|
Weight of machine |
kg |
550 |
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